Technology of Korea – Keri’s optical lithography
สถาบันวิจัยวิทยาการไฟฟ้าแห่งเกาหลี (Korea Electrotechnology Research Institute -KERI) ได้พัฒนา Lithography- กระบวนการสร้างเซลล์และทรานซิสเตอร์ในแผ่นซิลิคอน ซึ่งใช้สำหรับเก็บบิตข้อมูล- เป็นแบบนาโนรายแรกของโลก ซึ่งสำค้ญยิ่งต่อการผลิต semiconductor ในอนาคต
story by Oh Hae-young : Monday, April 5th, 2010A Long Sought After Dream Technology. KERI develops the world’s first nanopattern lithography technology for semiconductors and displays
The Korean research team, led by Dr. Oh Hyeon-seok, has successfully developed the much sought-after core technology for producing cylindrical nano molds that are needed for next-generation semiconductors and displays.
?This state-of-the-art technology, developed by the Korea Electrotechnology Research Institute (KERI) for the first time in the world, enables the high-precision mass printing of nanometer-scale patterns on large-area substrates for semiconductors and LCD displays and solar cells.
This technology, a trail-blazing feat that breaks one of the technological bottlenecks holding back the industry for a long time, is expected to transform the whole paradigm of mass-producing semiconductors and displays, thereby significantly contributing to South Korea taking the lead in the global market. On top of that, this technology is predicted to speed up the launch of next-generation products – such as wearable computers and foldable displays.
Here is how this technology works: cylinder-shaped large-area nanopattern lithography equipment, which combines magnetic levitation technology and electronic beams, and cylindrical nano-etching equipment, which is supported by plasma technology. This creates nanostructures on the surfaces of cylindrical nano molds.
Innovative technologies that enable the mass production of nanometer-scale patterns on substrates are required to churn out next-generation system-on-chips (SOC), high-luminance optical films for displays and next-generation solar cells. That’s why European nations and Japan had strenuously launched cross-border joint research projects; large companies and research institutes around the world had taken pains to develop relevant technologies to no avail. Against this backdrop, KERI, a state-funded research institute established in 1977, came forward with this technological breakthrough, based on its ultra high-precision magnetic levitation technology that was acquired through the development of magnetic levitation trains.
According to the research team at KERI, its newly-developed nano molds can be directly employed in the following areas: next-generation semiconductors, displays, solar cells and counterfeit-proof bank notes. Relevant companies and institutions are now busy discussing ways to capitalize on this technology.
As for LCD TVs, layers of films can be replaced with one nanopattern special optic film, which will result in cutting down on the components needed for LCD panels. Films that can replace Dual Brightness Enhancement Film (DBEF), exclusively supplied by 3M, in particular, can go into mass production, thereby forestalling capital outflows, estimated at more than KRW 500 billion.
In addition, the mass production of polarized light filters and lenticular lenses – the key parts of 3D TVs that global display makers, like Samsung, Sony, LG, and Panasonic, have competitively produced at the tail of the movie Avatar 3D’s mega success- will be made possible. This is likely to lead to achieving low prices and high penetration levels, which are required to jack up the market share of 3D TVs that are projected to reach US$17 billion by 2018.
Transparent thin-film AMOLED switching transistors, the key parts of transparent displays that appeared in the movie “Minority Report”, can be produced in the form of large-area films, paving the way for the mass production of head-up displays (HUD)- used for airplanes, trains, and cars – and smart glass, also called smart windows. As a matter of fact, Samsung Electronics drew much attention by showcasing its transparent OLED laptop using transparent AMOLED switching transistors at CES 2010, a trade show held each January in Las Vegas.
Also, this technology can be utilized in producing counterfeit-proof products. If this technology is applied to the production of hologram patterns, it can help nip fabrication problems in the bud. As a result, this anti-counterfeit technology can be used to prevent the following things from being duplicated: plastic cards – such as ID cards, credit cards and corporate security cards- bank notes, gift certificates and luxury goods like designers’ bags, cosmetics and liquors.
credit : http://www.koreaittimes.com